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Semiconductor Process Equipment.

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TEK-VAC PDS-6000 CLUSTER TOOL

 

PROCESS EQUIPMENT

CHEMICAL VAPOR DEPOSITION (CVD)
METAL ORGANIC CVD
PLASMA ENHANCED CVD / ETCHING
MOLECULAR BEAM EPITAXY
BELLJAR COATING STATIONS
IMPREGNATORS
NUCLEAR GAS HANDLING SYSTEMS
LIQUID PHASE EPITAXY
CLUSTER TOOLS
LEAK DETECTORS
GAS ANALYZERS
WASTE GAS TREATMENT

HIGH VACUUM AND PROCESS EQUIPMENT

VACUUM CHAMBERS
VACUUM FURNACES
ENVIRONMENTAL TESTING
ALTITUDE TESTING
DEGASSERS
GLOVE BOXES

ALSO.......

NUMEROUS FEEDTHROUGH OPTIONS
DEPOSITION / ETCHING SERVICES
HELIUM LEAK TEST SERVICES

PLEASE VIEW OUR STANDARD PRODUCT LISTING

 

Tek-Vac Industries, Inc. 2002