BURNBOX / SCRUBBER FEATURES

• Ability to treat the substantial number of chemicals involved in semiconductor fabrication and materials processing.
• Compact construction, simple installation.
• 10 liter/min capabilities, larger rates of treatment for certain applications.
• Stainless steel piping and standard 1.0" S/S KF style flanges for inlet/outlet connections.
• Safety interlock to process valves (dry contact) shuts off gas flow if system is below required temperature.
• Convenient access to the removable burnbox particle trap.
• Quick and simple maintenance techniques.

GENERAL OPTIONS

• Individual burnbox (BB-10-LM) or scrubber (GSS-10-LM or our larger GSS-1250 (click for image)) units are available as well as the combination.
• Spare ports for gas monitors and detectors.
• Spare and replacement components.
• Please consult sales office concerning these and other options.
  

UTILITIES REQUIRED (for proper operation)

• 120 VAC, 50-60 Hz, 8 Amp, three wire
• Purge gases (1/4" connection):
• Inert gas (ie. He, Ar, or N2)
• Compressed air or O2
• Steel exhaust manifolding.
• Water coolant: 1 liter / min at 20 C to 30 C, 1/4" line size.