Chamber assembly:
Bell jar: Standard 18" dia. X 18"/24"/30".
Larger sizes available (to 24" dia.).
Base pressure of 10-8 torr, depending on cleanliness.
Baseplate: Standard 20" dia. X 1"
thick.
Type 304 stainless steel construction.
Sized to conform to larger belljar options.
Feedthrough collar: Standard 18"dia. X 3.5h". Number of ports and larger collars are customized to comply with specific requests.
Plumbing:
All valves, flanges and piping are constructed of type 304 stainless steel.
Standard Pumping System:
Roughing Pump: Standard 11 cfm with diffusion pump. Pumpdown time: approx. 5 minutes.
Diffusion Pump: Varian model VHS-6.
2400 l/s air. Ranges 10-3 to < 5 x 10-9 Torr.
Electrical: 50/60 Hz, 115/208/240 VAC, 2.2kW.
Water coolant: 50 lit/hr at 150C - 260C.
Baffle or cold cap option available.
Note: We do offer cryo and turbo pumps for this system, as well as mechanical and diffusion pumps with as specified capabilities. Notify us about your specific requirements.
General Electrical Utilities for VES-3000:
115/208/240 VAC, 50/60 Hz., 3-wire, 30 amps maximum.
General accessories and options:
| Stainless steel process chamber.
| Feedthroughs (see enclosed information).
| Instrumentation (thermocouples, ion gauges,
etc.)
| Mass flow controllers (please specify
desired number and capacities).
| 1 KVA SCR controlled evaporation sources.
| Non-standard quartz substrate heater lamps.
| Thin film shutters (automatic or manual).
| Magnetron sputter sources.
| Stainless steel planetary substrate holders.
| Quartz crystal, film thickness rate monitors.
| Electron beam gun evaporation sources
and power supplies.
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