 | One k watt SCR power pack.
| 1.5" throttle valve and controller.
| 0-10 torr capacitance manometer and digital
readout.
| Bayard-Alpert ionization gauge.
| 300 Watt, 13.56 MHZ, RF power supply.
| 700 Volt, 0.5 amp, DC power supply.
| Illuminated valve control panel.
| Robot control panel.
| Turbo-molecular pump power supply.
| Number of MFC's per process chamber: Unlimited
| Flow rate, air, at 0.1 torr: 100 sccm.
| Flow rate, air, at 1.0 torr: 2.5 liters/min.
| Substrate size: 6" round maximum.
| Substrate temperature: 500 C max.
| Number of process chambers: Up to three.
| Chamber material: Stainless Steel or
Aluminum.
| |
Utilities
Electrical: 230 Volt, 3 phase, 30 amp
Pneumatic: 80 PSI
Water: 15 gallons/hour
Pump purge gas: Dry N2, 5 SCFM min.
Pump Exhaust: (2) 1" tube bulkheads
Weight: 1500 lbs.