• A Compact Vacuum Bake Module, Ideal for Processing up to 12" x 12" wafers.
• Digital temperature control with P.I.D and autotune features for precision control.
• Adjustable vacuum chucking pressure.
• Timed thermal contact provides excellent reproducibility.
• Automatic and manual versions.
• Safety interlocked
• Various fixture plates are available for multiple substrate processing.
  

The Tek-Vac PRC-2000 is a compact unit ideal for consistent curing of a broad range of photoresist material and substrate sizes.

A clean room compatible thermal plate features a precision ground surface and exceptional heat transfer. Thermal uniformity across the substrate is typically +/- 1%.

The PRC-2000 utilities include:

Power requirements of 115 VAC, 50-60 hz, 12 amp.
Exhaust connection with a 2" to 1.25" reducer.
Standard fittings connect to house vacuum and exhaust manifolding.

(Return to main page.)

(Return to product index.)