 | Safe, low costing, and minimal maintenance
exhaust gas abatement equipment designed for years of continuous
operation.
| Systems designed to significantly diminish
toxic, corrosive, flammable, and pyrophoric gas exhaust to safe
levels.
| Ideal for treating the exhaust effluents
from process systems such as a deposition and etch reactor.
| Burnboxes, scrubbers and combinations
are available, tailored to suit your exact requirements.
| |
INTRODUCTION
TEK-VAC's Burnbox/Scrubber equipment efficiently and safely diminishes
unreacted gases and product constituents of semiconductor processes
such as low pressure CVD and ion implantation. Among typical chemicals
which can be handled by our gas burnbox & scrubber model (BBS-10-LM)
are SiH4,
GeH4,
PH3,
and B2H6. Other gases,
such as hydrogen and halogen chemistries (SF6, BCl3, CF4 , etc.) can be treated
with the standard model as well as with other available models
and options.
The basic principle of operation for the combination is as follows: Exhaust gases from the reactor enter the scrubber section from the system's vacuum pump. The gas bubbles through a cooling/scrubbing solution where chemical reaction and filtration occurs.
The gases flow from the scrubber and into the burnbox section. The burnbox compartment (Model # BB-10-LM) is comprised of a ceramic heater tube capable of temperatures of 800 C to assure a thorough treatment of the effluent. Decomposition and oxidation occurs as the gases pass the internal ceramic core. Finally, the hot treated gas is passed through a water cooled heat exchanger and into a safe ventilation area.
The standard features include a PID digital temperature controller with built in self-tuning, an inert gas inlet and rotameter, a power cord for a standard 120 VAC power outlet, a power level adjust and an alarm indicator.