FEATURES

• Reproducible precision flow rates.
• A full flow range of interchangeable electropolished 316 S/S flow pins.
• Helium mass spectrometer leak tight.
• Right angle and inline designs.
• Automatic and manual versions.
• Stainless steel or plated brass valve body construction.
• Bakeable to 200 C.
• Your choice of connection fittings.

INTRODUCTION

The Tek-Vac Industries' VARI-VAC® is a smooth acting, bellows sealing gas metering valve available with manual, motor driven, solenoid, or electropneumatic controlling actuators.

The low cost and high precision reproducibility make the VARI-VAC® instrumental in applications of vacuum sputtering, gas mixing & calibration, mass spectroscopy, ion etching, gas chromotography, and a wide array of operations associated with vacuum and gas process control.

Minimized internal volume and surface area assist in reducing outgassing and permit a rapid response time for gas flow adjustments. Flow pins are available with capabilities to control flows of 0 - 10-3 std cc/sec. to 0 - 5000 std cc/sec. Flow control is available down to 1 x 10-8 std cc/sec.

(Further detailed information and ordering information.)

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